发明名称 |
Anode design for semiconductor deposition |
摘要 |
An anode assembly including a perforated anode. A perforated anode holder holds the anode. The anode holder includes perforations at least in a bottom wall such that plating solution may flow through perforations in the anode holder and perforations in the anode. An anode isolator separates the anode and a cathode. The anode isolator includes at least one curvilinear surface.
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申请公布号 |
US6251251(B1) |
申请公布日期 |
2001.06.26 |
申请号 |
US19980192431 |
申请日期 |
1998.11.16 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
UZOH CYPRIAN E.;ANDRICACOS PANAYOTIS C.;DUKOVIC JOHN OWEN;WESTERFIELD, JR. ROBERT P. |
分类号 |
C25D7/12;C25D17/12;(IPC1-7):C25D21/18 |
主分类号 |
C25D7/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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