| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet head, and a method of manufacture, in which a driving board and a board corresponding to a counter board can be made from one Si board. SOLUTION: The ink jet head comprises a driving board 1 of Si, a polysilicon film 4 formed thereon through an oxide film 2, an opening 4a made in the polysilicon film 4, a driver IC chip 11 arranged on the opening 4a and the polysilicon film 4, a piezoelectric film 6 formed on the bottom of the opening 4a to extend over the polysilicon film 4, and a pressure generating chamber 1b formed in the driving board 1 beneath the piezoelectric film 6 and receiving ink pressurized by the piezoelectric film 6. The opening 4a prevents movement of the piezoelectric film 6 from being blocked at the time of pressurizing ink in the pressure generating chamber 1b.
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