| 发明名称 |
Adhesion of silicon carbide films |
| 摘要 |
The adhesion of a silicon carbide containing film to a surface is enhanced by employing a transition film of silicon nitride, silicon dioxide and/or silicon oxynitride.
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| 申请公布号 |
US6252295(B1) |
申请公布日期 |
2001.06.26 |
| 申请号 |
US20000597902 |
申请日期 |
2000.06.19 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COTE DONNA R.;EDELSTEIN DANIEL C.;FITZSIMMONS JOHN A.;IVERS THOMAS H.;JAMISON PAUL C.;LEVINE ERNEST |
| 分类号 |
C23C16/02;C23C16/32;H01L21/314;H01L21/316;H01L21/318;H01L21/768;H01L23/532;(IPC1-7):H01L23/58 |
主分类号 |
C23C16/02 |
| 代理机构 |
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