发明名称 CLEANING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cleaning device capable of efficiently removing sediments from the inside of a devices. SOLUTION: This cleaning device 1 is a device for cleaning a work as an object intended for cleaning using a cleaning liquid. The cleaning device 1 comprises a cleaning tank 3 to which a second pressure adjusting means 35 is connected a sedimentation tank 4 to which a first pressure adjusting means 45 is connected, a circulation line L10 consisting of a buffer tank 5, a regenerator 6 a storage tank 7, a rinsing tank 8 and piping, a waste liquid line L40 connected to the sedimentation tank 4, a drying line L90 having a drying tank 9, a line L60 for connecting the regenerator 6 to the sedimentation tank 4, a second waste liquor line L100 having a waste liquor device 10, a line L80 for connecting the rinsing tank 8 to the buffer tank 5 and a second connecting pipe 49 for connecting the cleaning tank 3 to the sedimentation tank 4.
申请公布号 JP2001170574(A) 申请公布日期 2001.06.26
申请号 JP19990362671 申请日期 1999.12.21
申请人 SEIKO EPSON CORP 发明人 HARA TAKASHI;YADA MASATO
分类号 B08B3/02;B01D21/24;B08B3/08;B08B3/14;(IPC1-7):B08B3/02 主分类号 B08B3/02
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