| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic treatment apparatus of which ultrasonic oscillators can stably be operated and which can carry out uniform ultrasonic treatment evenly to an object to be treated. SOLUTION: The ultrasonic treatment apparatus comprises ultrasonic oscillators 17... so arranged as to form a projection region 21 with one continuous shape on a plane perpendicular to the transportation direction of a glass substrate 11 among lower part washing liquid supply nozzles 14a, 14b for supplying a washing liquid for the lower face to the glass substrate 11 and the width length D1 of the projection region 21 is adjusted to be at shortest the width length D2 of the glass substrate 11, which is an object to be treated. The flow passage of a liquid positioned in immediately downstream side of the ultrasonic oscillators 17..., that is, the inner face of the lower part washing liquid supply nozzles 14a, 14b, is extended upward from the upstream side to the downstream side. |
