| 摘要 |
PROBLEM TO BE SOLVED: To form a metal oxide film constituting a protective film, a transparent electrode film or a dielectric substance film at a low cost. SOLUTION: This method for forming the metal oxide film to solve the subject is characterized in that a fixed part of a substrate is coated with a coating composition containing an aliphatic acid salt or an alkoxide of metal as a raw material for the metal oxide film constituting the protective film, the transparent electrode film or the dielectric substance film to form a primary film. The primary film is irradiated with ultraviolet rays in an oxidizing atmosphere to form the metal oxide film.
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