发明名称 Lithography using quantum entangled particles
摘要 A system of etching using quantum entangled particles to get shorter interference fringes. An interferometer is used to obtain an interference fringe. N entangled photons are input to the interferometer. This reduces the distance between interference fringes by n, where again n is the number of entangled photons.
申请公布号 US6252665(B1) 申请公布日期 2001.06.26
申请号 US19990393451 申请日期 1999.09.10
申请人 CALIFORNIA INSTITUTE OF TECHNOLOGY 发明人 WILLIAMS COLIN;DOWLING JONATHAN
分类号 G03F7/00;G03F7/20;(IPC1-7):G01B9/02 主分类号 G03F7/00
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