| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an ink-jet printer head by batch forming each part with the utilization of an electrochemical process. SOLUTION: The manufacturing method includes a step of forming a crater layer to a lower part of a substrate, a step of forming a nozzle plate to a lower part of the crater layer, a step of forming a channel plate to a lower part of the nozzle plate, a step of forming a reservoir plate to a lower part of the channel plate, a step of forming a restricter plate to a lower part of the reservoir plate, a step of forming a chamber plate to a lower part of the restricter part, a step of plating thereby forming a diaphragm to a lower part of the chamber plate, a step of removing the substrate, a step of totally removing a remaining photoresist, a step of forming a piezoelectric/electrostrictive film which is actuated when a power source is impressed to an upper part of the diaphragm, and a step of forming an upper electrode to an upper part of the piezoelectric/electrostrictive film. |
