| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric diaphragm pump capable of securing sealing ability for a passage. SOLUTION: This piezoelectric diaphragm pump is provided with a diaphragm formed out of a piezoelectric element, upper and lower enclosures 5a, 5b where a passage 2 constituted by a suction passage 2a and a discharge passage 2b is formed between them, a suction valve and a discharge valve formed by interposing a membrane valve 7 between the upper and lower enclosures 5a, 5b, and a pump chamber formed between the diaphragm and one enclosure 5a. In the pump, a fluid is passed from the suction passage 2a to be discharged to the discharge passage 2b through the pump chamber by bending movement of the diaphragm. An O-ring 12 is disposed along the passage 2 in one of the upper and lower enclosures 5a, 5b, and the upper and lower enclosures 5a, 5b are fastened with the O-ring 12 interposed between them.
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