| 摘要 |
PROBLEM TO BE SOLVED: To provide ceramics having characteristics excellent in high compactness, high rigidity, low thermal expansion properties and high electroconductivity, and capable of being suitably used as a substrate for a component for producing a semiconductor device. SOLUTION: The ceramics with isolated cells each having an average diameter of <=5 μm have (1) the porosity of the cells of <=7%, (2) a comparable rigidity [Young's modulus (GPa)/density (g/cm3)] of >=30 and (3) the absolute value of a coefficient of thermal expansion according to JIS R1,618 of <=3×107/K at 20-30 deg.C. |
