摘要 |
PROBLEM TO BE SOLVED: To provide a production apparatus usable in the field of precision electronics industry, capable of readily obtaining an aqueous solution of hydrogen peroxide having an extremely low impurity and yet a high concentration of hydrogen peroxide, suitable for producing a high-purity aqueous solution of hydrogen peroxide. SOLUTION: This apparatus for producing the high-purity aqueous solution of hydrogen peroxide comprises a distillation column (A) equipped with a piping (1) for supplying a crude aqueous solution of hydrogen peroxide at the bottom part of the column, a piping (3) for extracting a high-purity aqueous solution of hydrogen peroxide at the middle part and a piping (5) for injecting extrapure water and a piping (4) for extracting a distillate at the top of the column, having an inner wall made of fluororesin and packed with a rectification member made of a fluororesin and a falling film type reboiler (D) attached through a piping (6) for discharging a bottom liquid and a piping (11) for reintroducing the heated bottom liquid to the bottom part of the distillation column.
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