| 摘要 |
PURPOSE: To provide a substrate conveyor and a conveyance teaching system which reduce a load of an operator, and also can perform a teaching process automatically, in order to effectively cancel a position misalignment accurately and in a short time. CONSTITUTION: Optical connectors 251, 252, 253, 254 of a tool 200 are counter to optical connectors 256, 257, 258, 259 provided and fixed to a substrate conveyor, respectively, and their optical axes coincide with each other. A lens of a high light-gathering ratio is housed in each optical connector. An optical signal is emitted from optical sensor heads 231, 241 via an optical fiber F2, each optical connector and an optical fiber F1, and also that optical signal incident on optical sensor heads 232, 242 is led to the interior of the substrate conveyor. An arm 31b is moved automatically to a 3-axis direction, whereby the edge position of a detection part 122 is detected to obtain positional information and acquires teaching information.
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