| 摘要 |
PURPOSE: A processor is provided to easily control circulation gas. CONSTITUTION: The processor has a shower head(200) supplying processing gas into a process chamber through several gas supply holes, a turbopump exhausting processing gas from the process chamber and a circulation gas piping(150) returning at least a part circulation gas(Q2) of exhaust gas exhausted from within the process chamber by the turbopump to the shower head. The shower head is provided with a primary gas supply system which supplies primary gas(Q1) supplied from a gas source into the process chamber through several primary gas jet holes(h1), and a circulation gas supply system supplying circulation gas into the process chamber through several circulation gas supply holes. The primary gas supplying system and the circulation gas supply system are independent systems. Since primary gas and circulation gas can be mixed in the process chamber for the first time, circulation gas can easily be controlled even if pressure control is not conducted.
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