发明名称 MODIFIED HETEROJUNCTION BIPOLAR TRANSISTOR HAVING MATERIAL STRUCTURE FOR LOW COST FABRICATION ON LARGE SIZE GALLIUM ARSENIDE WAFERS
摘要 PURPOSE: A modified heterojunction bipolar transistor is provided to achieve a structure for material with high efficiency and low-voltage operability. CONSTITUTION: The new metmorphic heterojunction bipolar transistor has a semi- insulating Ga As substrate, undoped modified barrier film, and a heavily-doped n-type InGaAs film, forming an ohmic electrode of a collector in response with the structure of material for a GaAs wafer. Therefore, the modified heterojunction bipolar transistor includes a lightly-doped n-type InGaAs or InP or InAlAs film, forming a collector of the modified heterojunction bipolar transistor, heavily-doped n-type InGaAs film forming a base of the modified heterojunction bipolar transistor for an ohmic base electrode, an n-type InGaAs or inclined AlInGaAs or InP film forming an emitter of the modified heterojunction bipolar transistor, and the heavily-doped InGaAs film forming an ohmic emitter electrode of the modified heterojunction bipolar transistor.
申请公布号 KR20010050866(A) 申请公布日期 2001.06.25
申请号 KR20000058495 申请日期 2000.10.05
申请人 CHAO PENG-SHENG;LIN TONY YEN-CHIN;WU CHAN-SHIN 发明人 CHAO PENG-SHENG;LIN TONY YEN-CHIN;WU CHAN-SHIN
分类号 H01L29/73;H01L21/205;H01L21/331;H01L29/205;H01L29/737;(IPC1-7):H01L29/737 主分类号 H01L29/73
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