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发明名称
PERFORATED SILICON MEMBRANE PROVIDED BY AN ELECTROCHEMICAL ETCHING METHOD
摘要
申请公布号
KR20010052320(A)
申请公布日期
2001.06.25
申请号
KR1020007012422
申请日期
2000.11.07
申请人
发明人
分类号
C25F3/12
主分类号
C25F3/12
代理机构
代理人
主权项
地址
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