发明名称 CONTROLLER FOR LIGHT IRRADIATING QUICK HEAT TREATMENT APPARATUS
摘要 PURPOSE: To provide a controller of a light irradiating quick heat treatment apparatus for quickly increasing the temperature of an object to be heated without control delay by improving the power factor, and removing the influence of higher harmonic distortions. CONSTITUTION: A lamp 1 is arranged in the lamp chamber of light irradiating quick heat treatment apparatus, and a work to be heat-treated is arranged in a treatment chamber 4. The area where the lamp 1 is arranged is divided into plural zones corresponding to the distances from the center of the region, and at least one or more lamps are set in each zone, and a power control unit 12 is set corresponding to each zone. A control part 11 generates a PWM signal based on a control pattern stored preliminarily, and transmits it to each power control unit 12. The power control unit 12 is provided with a switching element, and the switching element is turned on/off according to the PWM signal, and the power to be supplied to the lamp 1 belonging to each zone can be respectively controlled.
申请公布号 KR20010050917(A) 申请公布日期 2001.06.25
申请号 KR20000059069 申请日期 2000.10.07
申请人 USHIO INC. 发明人 GANO TAKAYUKI
分类号 H01L21/26;H01L21/00;H01L21/324;H05B37/02;(IPC1-7):H01L21/324 主分类号 H01L21/26
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