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发明名称
ELECTRODE FOR PLASMA PROCESSES AND METHOD FOR MANUFACTURE AND USE THEREOF
摘要
申请公布号
KR20010053289(A)
申请公布日期
2001.06.25
申请号
KR1020007015011
申请日期
2000.12.29
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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