INSULATING SUBSTRATE FOR FORMING CONDUCTIVE THIN FILM AND LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME

摘要

PURPOSE: To enhance adhesion of a wiring film to a substrate for the purpose of enhancing reliability of wiring and to enhance resist adhesion for the purpose of enhancing accuracy of wiring patterns. CONSTITUTION: An insulating substrate 101 is cleaned with oxygen plasma, then stabilized by treatment with nitrogen plasma to form a clean treated layer 102. Then a conductive thin film having three-layered structure consisting of a nitried layer 103 of a conductive metal, a nitried layer 104 of a conductive metal, and a nitride layer 105 of a conductive metal is formed by a sputtering method.