发明名称 VACUUM CHUCK PEN
摘要 PURPOSE: To provide a vacuum-chuck pen which is improved in operability. CONSTITUTION: When a control lever 9 is lowered while the internal volume of the vacuum-chuck pad 1 of a vacuum-chuck pen is reduced by deforming the pad 1 by pressing the pad 1 against a work 14, the claw 7a of a lock operating section 7 rides on the key 9a of the lever 9. Therefore, when the external force applied to the lever 9 is released, a valve stem 6a is pulled up by a rotary lock section 8, and a valve 6 is seated on a valve seat 3. Consequently, a vacuum passage 2a is blocked and the work 14 is chucked at the pad 1 by vacuum.
申请公布号 KR20010050978(A) 申请公布日期 2001.06.25
申请号 KR20000059960 申请日期 2000.10.12
申请人 NEC CORPORATION 发明人 UNOKUCHI FUKUMI
分类号 H01L21/677;B25B11/00;B25J15/06;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 H01L21/677
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