VACUUM COATING APPARATUS FOR DEPOSITING COATINGS ON OPTICAL SUBSTRATES

摘要

PURPOSE: Vacuum deposition device has tensioning devices for a substrate arranged via an axis on a support device and connected via a drive. CONSTITUTION: The drive comprises a planetary gear. A planetary wheel(6') is connected to each tensioning device for a substrate. The rotation shaft(3') of the support device is arranged eccentrically to the central axis of the static sputtering target of the magnetron sputtering deposition source.