| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectrometer object lens that makes more accurate measuring results and obtains smaller energy to use for an electric field. SOLUTION: In a spectrometer object lens used in a particle beam measuring apparatus having an object lens forming a particle beam optical unit for bundling primary particle beam (2), and a deceleration electric field spectrometer, the speed reduction electric field spectrometer comprises a pull-out electrode device (3) for pulling secondary particles (4) from a sample (5), an acceleration electrode device 6 for accelerating the secondary particles (4) toward the object lens (1), a deceleration electric field device (7) for producing potential barrier for decelerating the secondary particles (4), means (8) for recharging the pull-out electrode device (3) to at least two different voltages (Vex) for regulating strength of the electric field, and means (9) for recharging the acceleration electrode device (6) correspondingly to the voltages (Vex) of the extruding electrode device (3) for forming the secondary particle bundle which is passed through the deceleration electric field device (7).
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