NON-ABSORPTIVE RETICLE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a reticle which can decrease thermal strains and allows the use of high illumination energy leading to shortening of exposure time and an increase of a processing quantity. SOLUTION: A translucent substrate is included and a reflection region is disposed on this translucent substrate. An electromagnetic radiation obstruction region is disposed on this reflection region. The reticle is so constituted that the electromagnetic radiation transmitted through the translucent substrate is reflected from the reflection region before arriving at the electromagnetic radiation obstruction region.