| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for determining the angle of incidence of the irradiating light to irradiate a portion in the vicinity of a tip of a probe to realize the high resolution and high contrast, and a scan near-field optical microscope. SOLUTION: The method for determining the angle of incidence of the irradiating light to irradiate the portion in the vicinity of the tip of the prove in the scan near-field optical microscope comprises a step of irradiating the irradiating light on a portion to be observed of a sample and receiving the reflected light while changing the angle of incidence of the irradiating light, and seeking the angle of incidence to minimize the angle dependency of the intensity of the reflected light. The scan near-field optical microscope comprises a light source for irradiating light on the location to be observed of the sample and adjusting the angle of incidence, and a detecting means to detect the irradiating light reflected by the sample, and can measure the angle dependency to the angle of incidence of the intensity of the reflected light detected by the detecting means.
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