发明名称 CONTACT PROBE
摘要 PROBLEM TO BE SOLVED: To provide a contact probe capable of surely scrubbing and obtaining electrical contact even for an object pad P as an electrode terminal, which are arranged in a plurality if rows in parallel or in a cross stitch on the upper surface if a semiconductor chips T and the like. SOLUTION: The contact probe 11 is made of a plurality of pattern wirings 13 and 15 on the surfaces 12a and 14a of film bodies 12, and 14 and the tip end of the pattern wirings 13 and 15 are made to contact pins 17 and 18 at the tip end of the film bodies 12 and 14. A plurality of film bodies 12 and 14, on each of which pattern wirings 13 and 15, are formed are directed in the same direction and the tip end positions of the contact pins 17 and 18 are piled mutually with a shift in this direction between film bodies 12 and 14.
申请公布号 JP2001165957(A) 申请公布日期 2001.06.22
申请号 JP19990346929 申请日期 1999.12.06
申请人 MITSUBISHI MATERIALS CORP 发明人 TACHIKAWA NOBUYOSHI;MATSUDA ATSUSHI;UEKI MITSUYOSHI;YAMADA OSAMU;ITO KENICHI
分类号 G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R1/073
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