| 摘要 |
PROBLEM TO BE SOLVED: To obtain measurement pressure accuracy that is not operated by the temperature of a target whose pressure is to be measured and at the same time obtain a heat-resistance pressure sensor. SOLUTION: In the pressure sensor, light that is split into two polarization components by a light splitting/coupling means 3 is applied to a plurality of locations on the projection deformation surface of a pressure reception diaphragm 5 that has received pressure that is to be measured, and pressure is detected according to each reflected light intensity ratio.
|
