| 摘要 |
PROBLEM TO BE SOLVED: To realize a highly precise observation and measurement at a low cost. SOLUTION: The laser beam emitted from a laser oscillator 10 is emitted to a semiconductor wafer 2 fixed and supported by a wafer holder 11 by an objective lens 16, and the laser beam reflected, scattered, refracted and returned by the semiconductor wafer 2 is imaged by a CCD image pickup element 19. The imaging result is arithmetically processed in an arithmetic processing part 20. At this time, the objective lens 16 and the wafer holder 11 are rotated so that the asymmetric component of the optical system error is minimized.
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