| 摘要 |
PROBLEM TO BE SOLVED: To separately inspect a defect of a layer constituting a function film. SOLUTION: A defect of a reflection-preventing layer at a back surface of a function film 1 conveyed by conveying means 11, 12 is detected by a reflection light by first detection means 13a, 14a, 15a. A defect on a back surface of the function film 1 and a damage, etc., on a surface (function surface) are detected by a reflection light by second detection means 13b, 14b, 15b. A defect such as a crack and a scratch at the inside of a film is detected by a scattered light passed through the function film 1 and scattered by third detection means 13c, 14c, 15c. A detection result of the first, second and third detection means is totally evaluated by a judging means 17. A mark corresponding to a kind of defect is applied to a defect position of the function film 1 based on the evaluation result by a mark means 20. |
