| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer transfer apparatus which can suppress wafer transfer error and wafer damage involved thereby. SOLUTION: A wafer transfer apparatus 1 has a first stage 6 for holding a first housing 2, a second stage 7 for holding a second housing 3, a first push arm 4 for transferring a plurality of wafers 9 from the first housing 2 to the second housing 3, a second push arm 5 for transferring the wafers 9 from the second housing 3 to the first housing, and a vertical position adjusting mechanism 8 for moving up or down the first housing 2. The first and second housings 2 and 3 can contain a plurality of wafers 9 kept with a predetermined spacing in the vertical direction. The wafer transfer apparatus 1 can adjust a vertical relative position between the first and second housings 2 and 3 by the mechanism 8 which moves up or down the first housing.</p> |
