| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing apparatus equipped with a spinner cleaning section for preventing occurrence of incomplete static electricity (electrostatic flaw) in a semiconductor chip after cleaning a spinner. SOLUTION: A spinner cleaning section 20 comprises a turntable 22, a rotary shaft 24 for turning the turntable, and a cleaning liquid nozzle tube. The turntable has an ion blow section 26 in the center on the upper surface and a ring- like vacuum suction part 28 formed stepwise around the ion blow section. The turntable is formed of foamable stainless steel and has a central recess wherein the surface is sealed except the vacuum suction part and connected with a vacuum sucker through a vacuum suction tube 32 connected with the lower surface. The ion blow section has an ion gas flow distribution tube 38 provided with a plurality of opemngs 36 in the upper surface and penetrating a disc-like member 34 formed to fill lower half section of the recess. The ion gas flow distribution tube is connected with an ionizer generating ion gas flow through an ion gas flow supply pipe penetrating the rotary shaft and the bottom part of the turntable.
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