发明名称 CATADIOPTIC OBJECTIVE LENS HAVING TWO INTERMEDIATE IMAGES
摘要 PROBLEM TO BE SOLVED: To provide a high-resolution objective lens having a reduced lens diameter and high performance relating to the catadioptic objective lens having two intermediate images. SOLUTION: This objective lens includes a first partial objective lens, the first intermediate image, the second partial objective lens, the second intermediate image and the third partial objective lens and at least one of the partial objective lens is purely refractive.
申请公布号 JP2001166210(A) 申请公布日期 2001.06.22
申请号 JP20000334325 申请日期 2000.11.01
申请人 CARL ZEISS:FA 发明人 SHAFER DAVID;ULRICH WILHELM;HERKOMMER ALOIS;SCHUSTER KARL HEINZ;FUERTER GERD;VON BUENAU RUDOLF
分类号 G02B17/00;G02B17/08;G03F7/20;H01L21/027;(IPC1-7):G02B17/08 主分类号 G02B17/00
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