PLASMA PROCESSING APPARATUS AND ITS SUPPORTING TOOL

摘要

PROBLEM TO BE SOLVED: To enable to suitably process a flexible thin material. SOLUTION: A support tool 40 is provided with a mount surface forming member 41 comprising a conductive plate with a simple protruding surface for mounting an object as a mount surface 41a, a clipping member 57 for clipping the end of an object 70, and an acting means 61 for energizing the clipping member 57 to the surface opposite to the object 70. The support tool supports a plasma processing apparatus 10 in which the object 70 is placed horizontally to expose a plasma beam inside a vacuum chamber 20. The mount surface forming member 41 serves as a feeder and an excellent electrode, and secures to bring the object 70 into tight contact with a mount surface 24a in spite of eliminating its complicated configuration. Therefore, the thermal deformation of the object can be reduced forcedly by means of the energizing force.