| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of a structure having stripe-like main discharge electrodes disposed oppositely and a pin electrode array for pre-ionization of laser gas disposed in the vicinity thereof that the pin electrode is consumed through erosion and laser gas is deteriorated. SOLUTION: A pair of stripe-like main discharge electrodes 11A, 11B are disposed opposite to each other, and a peaking capacitor 15 is connected between both electrodes. A pre-ionization electrode 12 comprising a rod-like electrode material coated with a dielectric 14 is provided at a position on an insulation plate 13 parallel with the main discharge electrode 11B and connected with the main discharge electrode side on the ground side through a lead wire 12A. Creeping corona discharge takes place on the insulation plate 13 between both electrodes 11B and 12, when the voltage of the peaking capacitor 15 is increased and laser gas is pre-ionized with UV-rays generated through corona discharge. |
