发明名称 HIGH PULSE REPETITION RATE PULSE POWER SOURCE SYSTEM PROVIDED WITH FAST RISE TIME AND LOW LEAKAGE CURRENT
摘要 PROBLEM TO BE SOLVED: To provide a high pulse rate pulse power source system with fast rise time and low leakage current. SOLUTION: A high pulse rate pulse power source for supplying controlled high energy electrical pulses at repetition rate of 2,000 Hz or higher. The source includes a pulse generating circuit including a charging capacitor, a semiconductor switch, and a current-limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increase peak voltage to at least 12,000 volts. An ultra-fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system, including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2,000 charges per second.
申请公布号 JP2001168430(A) 申请公布日期 2001.06.22
申请号 JP20000277282 申请日期 2000.08.09
申请人 CYMER INC 发明人 PARTLO WILLIAM N;BIRX DANIEL L;NESS RICHARD M;ROTHWEIL DANIEL A;MELCHER PAUL C;SMITH BRETT D
分类号 G03F7/20;H01S3/097;H01S3/225;H02M3/00;H02M9/04;H03K3/57;H03K17/80;(IPC1-7):H01S3/097 主分类号 G03F7/20
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