| 发明名称 |
INDUCTOR, SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICODUCTOR DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide an inductor which can be manufactured by an existing facility and which can contribute to the miniaturization of a unit. SOLUTION: The semiconductor device has the inductor 100 and CMOSFET 200 on SOI. The inductor 100 is obtained by executing photolithography and etching on a cobalt thin film formed on a LOCOS film 6.
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| 申请公布号 |
JP2001168289(A) |
申请公布日期 |
2001.06.22 |
| 申请号 |
JP19990353070 |
申请日期 |
1999.12.13 |
| 申请人 |
SEIKO EPSON CORP |
发明人 |
TAKAMURA TAKASHI |
| 分类号 |
H01F17/00;H01L21/02;H01L21/822;H01L27/04;H01L27/06;H01L27/08;(IPC1-7):H01L27/04 |
主分类号 |
H01F17/00 |
| 代理机构 |
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