发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a method for manufacturing it, capable of being sufficiently corresponding to an increase in the chip area and manufactured in a mass production at a low cost. SOLUTION: This semiconductor device comprises a semiconductor element, formed in a columnar base or on the outer surface of a cylindrical base. The method for manufacturing the semiconductor device comprises the steps of generating the plasma of a substantially cylindrical shape, jointly having a central axis with that of the base to form the element in the base or on the outer surface of the base, and treating the outer surface of the base by using the plasma.
申请公布号 JP2001167994(A) 申请公布日期 2001.06.22
申请号 JP19990348651 申请日期 1999.12.08
申请人 KAWASAKI STEEL CORP 发明人 SUZUKI YASUTSUGU
分类号 C23C16/507;H01L21/02;H01L21/203;H01L21/301;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/02 主分类号 C23C16/507
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