| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for exposing a spherical device by floating it. SOLUTION: This apparatus for exposing a spherical device comprises a first means 2 for lifting and holding a device 1 at a prescribed position, a second means 4 for rotating the device 1, a third means 6 for detecting the position, the rotating direction and the speed of the device 1, and a fourth means 7 for exposing the exposure surface of the device 1. |
