| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner that a holder vacuum-sucking a photosensitive substrate is highly accurately positioned without giving adverse effect on the rotating performance of a rotating table with respect to the aligner executing projection alignment by intermittently or continuously rotating the photosensitive substrate. SOLUTION: This aligner possesses the holder 5 at which the photosensitive substrate 6 is placed, a cylindrical member 8 having an outer cylindrical surface coming into slidable contact with the inner cylindrical surface of the cylindrical member 9 arranged on the upper surface of a stage to move the substrate 6 within a horizontal plane and an elastic body 7 attached to the upper end of the cylindrical member 8 and holding the bottom surface 5c of the holder.
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