| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for micro object capable of efficiently performing the classification between non-defective and defective with a simple structure. SOLUTION: This micro object inspecting device 1 comprises a fixed table 4 arranged so that the end surface is vertically raised with a slight distance from the discharge part 2b of a feeder 2, the table 4 having a suction opening 4A, an imaging opening 4B and a plurality of feeding openings 4D-4F successively and circularly arranged on the end surface; a rotating table 3 rotatably provided on the end surface of the fixed table 4, the table 3 having a plurality of pockets 3a extended through to both sides thereof and circularly arranged thereon; and cameras 5A-5F provided in the positions moving the space between the rotating table 3 and the discharge part 2b of the feeder 2 and the positions mutually opposed through the imaging opening 4B of the fixed table 4.
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