METHOD OF ACHIEVING HIGHER INVERSION LAYER MOBILITY IN SILICON CARBIDE SEMICONDUCTOR DEVICES

摘要

The invention provides a method for the production of high quality thermally grown oxide on top of silicon carbide. The high quality oxide is obtained by selectively removing the carbon from the silicon carbide in the areas where oxide formation is desired or required. The method includes the steps of: (a) amorphizing the silicon carbide in at least one region of a monocrystalline silicon carbide substrate by ion implantation; (b) removing at least an effective amount of the carbon resulting from amorphizing the silicon carbide with an etchant effective to selectively remove carbon from the amorphized silicon carbide to produce an amorphous silicon-rich region; and (c) forming an oxide on the etched surface to provide a device which has an oxide region on (1) either an amorphous silicon-rich region which is (i) predominantly or entirely amorphous silicon or (ii) a mixture of predominantly amorphous silicon in combination with minor amounts of amorphous silicon carbide and/or silicon dioxide or (2) a monocrystalline silicon region; wherein (1) or (2) is present on a region of a silicon carbide substrate, or (3) a region of a silicon carbide substrate.