| 摘要 |
<p>A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage variable controlled capacitor device is provided. The MEMS device comprises a microelectronic substrate (10), a substrate signal electrode (30), and one or more substrate control electrodes (40). The MEMS device also includes a moveable composite (60) overlying the substrate, having a composite signal electrode (62), one or more control electrodes (68), and a biasing element (64, 65). In cross-section, the moveable composite comprises at least one electrode layer and, in most instances, a biasing layer. In length, the moveable composite comprises a fixed portion attached to the underlying substrate and a distal portion moveable with respect to the substrate electrode. The distal and/or medial portions of the moveable composite are biased in position when no electrostatic force is applied. Additionally, the MEMS device comprises insulators to electrically isolate the substrate and electrodes. Applying a variable controlled voltage between the substrate control electrode and moveable composite control electrode, controls the bias of the moveable composite and, in turn, controls the capacitance between the substrate signal electrode and the composite signal electrode.</p> |
