发明名称 INTERMEDIATE SUCTION SUPPORT AND USE THEREOF FOR MAKING A THIN-LAYERED STRUCTURE
摘要 The invention concerns an intermediate suction support, having at least a suction surface (62) designed to receive a first surface of at least a substrate comprising an embrittled layer, a film being thus defined between the first surface of the substrate and the embrittled layer, the suction surface (62) of the intermediate support being the surface of at least a suction element (63) including suction means designed so that, when the embrittled layer is subjected to a treatment causing the film to be separated from the rest of the substrate, the film can be recovered. The invention is useful for making a thin-layered structure.
申请公布号 WO0145178(A1) 申请公布日期 2001.06.21
申请号 WO2000FR03482 申请日期 2000.12.12
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;JAUSSAUD, CLAUDE;BRUEL, MICHEL;ASPAR, BERNARD 发明人 JAUSSAUD, CLAUDE;BRUEL, MICHEL;ASPAR, BERNARD
分类号 H01L21/683;H01L21/762;H01L31/0392;H01L31/18 主分类号 H01L21/683
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