发明名称 |
INTERMEDIATE SUCTION SUPPORT AND USE THEREOF FOR MAKING A THIN-LAYERED STRUCTURE |
摘要 |
The invention concerns an intermediate suction support, having at least a suction surface (62) designed to receive a first surface of at least a substrate comprising an embrittled layer, a film being thus defined between the first surface of the substrate and the embrittled layer, the suction surface (62) of the intermediate support being the surface of at least a suction element (63) including suction means designed so that, when the embrittled layer is subjected to a treatment causing the film to be separated from the rest of the substrate, the film can be recovered. The invention is useful for making a thin-layered structure. |
申请公布号 |
WO0145178(A1) |
申请公布日期 |
2001.06.21 |
申请号 |
WO2000FR03482 |
申请日期 |
2000.12.12 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;JAUSSAUD, CLAUDE;BRUEL, MICHEL;ASPAR, BERNARD |
发明人 |
JAUSSAUD, CLAUDE;BRUEL, MICHEL;ASPAR, BERNARD |
分类号 |
H01L21/683;H01L21/762;H01L31/0392;H01L31/18 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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