Method of manufacturing a thin film transistor array substrate

摘要

A method of manufacturing a thin film transistor array substrate that includes photolithographically forming an active layer on a substrate. The photoresist mask remaining on the substrate is then removed using a stripper. After stripping, the substrate is immersed in a thin alkali-based solution. The array substrate is then cleaned using distilled water. Source and drain electrodes are then formed on the active layer.