HIGH PRECISION POSITIONING DEVICE AND METHOD OF OPERATING SAME

摘要

A high precision positioning device includes an end effector and a platen for receiving a workpiece. One of the end effector and the platen is moveable in the X - Y plane and in the Z direction. The device includes sensors for sensing the position of the end effector relative to the platen and a control system for controlling the movement of the end effector. Preferably the control system uses a position, velocity and acceleration control X and Y direction and an impedance control for Z direction. The method of operating the positioning device uses host and embedded computers. The method includes the steps of receiving and checking data; sending and decoding the data and determining when a move command appears; instructing a move command and determining set-point data; sending set-point data to regulator task module and sending data back from the sensors to the regulator task module; determining control parameters in the regulator task module and activating the motors.