| 摘要 |
<p>A system for controlling the processing and tracking of semiconductor wafers comprises, a host computer 1 and at least one process equipment 3, 4 or 5. The system may further comprise an automated materials handling system (AMHS) 7 and a storage shelf 6 for storing product wafers and non-product wafers. In use the host computer 1 receives a request from the process equipment 3, 4 or 5 for a wafer load. The computer 1 is triggered to dispatch a product lot comprising product and non-product wafers to the equipment making the request. A command is sent to the AMHS to carry the lot from the wafer shelf to the equipment. Process control information related to purpose and control of the requests of NPW's are appended to a master file 21 and provided with the carrying command. Further the processing history of the product and non-product wafers is stored in a history file 22 allowing complete tracking of the processing histories of both product and non-product wafers. Further disclosed is a computer program for use with the system.</p> |
