DEVICE FOR TREATMENT OF POLYMER FILMS WITH HEAVY IONS

摘要

treatment of materials with heavy ions treatment of polymer films on heavy ion accelerators. SUBSTANCE: proposed device includes vacuum chamber divided by vacuum tight partition into two cavities; one cavity includes radiating unit and other cavity contains film-movement mechanism with supply and receiving reels; each cavity is provided with individual forevacuum and turbo-molecular pumps. Vacuum-tight partition is provided with two slotted passages: one passage is used for transfer of polymer supply reel from film-movement mechanism cavity to radiating unit and other passage is used for transfer of treated film to receiving reel; sizes of slotted passage and permissible in leakage of desorbed gas into radiating unit cavity are by mathematical expression. EFFECT: improved quality of film; increased productivity of device. 4 dwg