| 摘要 |
<p>In ceramic sinter consisting of at least one kind selected from a group consisting of silicon nitride, zirconia, silicon carbide, cermet, SIALON, aluminum nitride and alumina, wear resistant member and electronic component member using thereof, skewness at a contact surface of the ceramic sinter is set at -2 or more and 0 or less, a depth of a micro-crack is set at 5 mu m or less, and in the depth of up to 500 mu m from the surface an area that pores occupy does not exceed 5 %. The ceramic sinter as described above can suppress wear of the opponent member. Further, in such ceramic sinter, bonding strength with an element or a metal plate can be heightened to enable to suppress peeling. The electronic components of high reliability can be fabricated accordingly. The present wear resistant member is suitable for sliding member that is used in portions where wear is particularly remarkable. The present ceramic sinter is suitable for electronic component member such as substrates, heat sinks or the like that tend to peel.</p> |
