METHOD FOR FORMING POLYMER FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming polymer films, which is capable of forming film polymer films having excellent concentration uniformity with high resolution directly on substrates having electronic circuit materials without adversely affecting the working characteristics of the electronic circuit materials. SOLUTION: This method for forming the polymer films includes a first stage for bringing the substrates having conductivity into contact with an aqueous electrolyte containing an electrodeposition material and a second stage for forming electrodeposition films by electrochemically depositing the electrodeposition material on the substrates by a change in hydrogen ion concentration. The aqueous electrolyte contains at least either of an ammonium compound and its salt. The ammonium compound or its salt is preferably in the form of a tetraalkyl ammonium compd. or tetraalkyl ammonium hydroxide.