| 摘要 |
PROBLEM TO BE SOLVED: To maintain a desired form of a lapping surface continuously by detecting deformation of the lapping surface in polishing operation and truing it promptly. SOLUTION: A mirror 14 is arranged on an axis L1 of rotation of a single- side lapping machine 1, and a mirror 23 is arranged on an axis L2 of rotation of a truing ring 2 placed on a peripheral region of a lapping surface 1a. Parallel light P1 and P2 from a projector 3 is incident upon the mirrors 14 and 23, and the reflected light is incident as point images upon a CCD camera 5. From the distance between the incident points on the CCD camera 5 of the reflected light from both the mirrors 14 and 23, a controller 6 detects the inclination of the axis L2 of rotation from the axis L1 of rotation. The position of the center of gravity of the truing ring 2 is controlled or moved along the radius of the lapping surface 1a via a center-of-gravity moving mechanism 61 so that the inclination is brought to zero, which maintains a continuously frat form of the lapping surface. |
