发明名称 |
Multi-channel electronically scanned cryogenic pressure sensor and method for making same |
摘要 |
A miniature, multi-channel, electronically scanned pressure measuring device uses electrostatically bonded silicon dies in a multi-element array. These dies are bonded at specific sites on a glass, pre-patterned substrate. Thermal data is multiplexed and recorded on each individual pressure measuring diaphragm. The device functions in a cryogenic environment without the need of heaters to keep the sensor at constant temperatures.
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申请公布号 |
US6247369(B1) |
申请公布日期 |
2001.06.19 |
申请号 |
US19990229931 |
申请日期 |
1999.01.13 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF THE NATIONAL AERONAUTICS OF SPACE ADMINISTRATION |
发明人 |
CHAPMAN JOHN J.;HOPSON, JR. PURNELL;HOLLOWAY NANCY M. |
分类号 |
G01L9/00;G01L9/06;G01L19/04;(IPC1-7):G01L9/04 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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