| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus which causes no trouble of such as dripping of a coating fluid and is capable of avoiding vain use of the coating fluid and shortening the time to be taken for the coating treatment. SOLUTION: A nozzle 40 in which a plurality of spraying holes 39 are arranged in a row to discharge a resist solution as a coating fluid toward the surface of a substrate G held by a holding plate 31 is installed in the lower part of a main body 38 of a coating head 36. While the nozzle 40 being scanned in the direction at right angles to the arrangement direction 50 of the spraying holes 39, the resist solution is sprayed simultaneously through a plurality of the spraying holes 39. |
